Product Description
Type Code
C5312D7730 5C1S12AR3235 HP
Technical Specifications
- Media temperature: 10 to 150 °C
- Ambient temperature: 0 to 40 °C
- Operating pressure: 0 to 6 bar
- Connection sizes: 1/4'' to 3/4''
- Body configurations: 2/2-way body
- Connection types: Flare | PrimeLock® | Super 300 Type Pillar®
- Body materials: PFA | PTFE
- Seal material: PTFE
- Supply voltage: 24 V DC
- Input signals: –10 V | 4–20 mA
- Actuating speed: Max. 2 mm/s
- Protection class: IP65
Description
The Gemue C53 iComLine 2/2-way diaphragm globe valve was developed for precise and demanding control applications in semiconductor production. The sealing concept of the valve is based on the tried and tested Gemue PD technology, whereby actuator and medium are separated by a PTFE regulating cone. As the regulating cone contour, actuator stroke and connection size can be customized to meet customers' requirements, the Gemue C53 iComLine satisfies virtually all control and flow requirements of the semiconductor industry. The precise stepper motor, in conjunction with the ultra pure body materials, is particularly suitable for lithography, CMP, and etching processes, as well as analytical applications in semiconductor production.
Features
- Control valve for ultra pure applications in the semiconductor industry
- High-resolution linear actuator with stepper motor
- Diaphragm globe valve based on the iComLine series
- Tried and tested plug diaphragm design
- All media wetted parts are made of PFA or PTFE
- 1 million qualified control switching cycles
- Cleanroom manufacturing (HP version), complies with SEMI F 57
Why Buy From Us
- Worldwide shipping of all valves and measuring instruments
- Large stock levels for many products – current lead times available on request
- Spare parts and service kits available
- Fast delivery by parcel courier or freight forwarder, express shipping available on request
- Extensive hands-on application expertise
- Personal advice on selecting the right component
- Dealers receive volume-based discounts on request
- Large enterprises, public authorities and government bodies can order on account (please contact us via our contact form)
